Wetting characteristic of nanoporous aluminum oxide films

Abstract Nanoporous aluminium oxide film template has been widely used over the last decade for development of numerous functional nanostructures such as nano sensors and nanophotonic devices. In this study, the nanoporous aluminum oxide film on silicon substrates were prepared from a 500 nm-thick aluminum film by low-temperature anodization process in a mixed solution of phosphoric and oxalic acids at different anodization voltage (10-50 Voltage). The morphology and wettability of nonporous aluminum oxide films were investigated by field emission scanning electron microscope and contact angle measurement, respectively. The result shown that the interpore of AAO template increase with anodization voltage increases. In addition, the wettability of the template depends on the pore size on the film surface.