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Acemap > Paper > 4-Methanesulfonyloxystyrene: A Means of Improving the Properties oftert-Butoxycarbonyloxystyrene-Based Polymers for Chemically Amplified Deep-UV Resists

4-Methanesulfonyloxystyrene: A Means of Improving the Properties oftert-Butoxycarbonyloxystyrene-Based Polymers for Chemically Amplified Deep-UV Resists

1995 
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