Research of High Performance Polarization-Independent Grating Beam Splitter

Based on a silicon-on-insulator (Silicon-on-insulator, SOI) material system design and optimization of a high performance, the polarization independent of 1 × 3 subwavelength grating stars beam splitter. By a rigorous coupled-wave analysis method showed that, in the 1550nm wavelength range, at vertical incidence, the device on the transverse electric field (transverse electric, TE) ,the 0 and ± 1 order transmittance is 31%, 32%, 32%,respectively; cross the magnetic field (transverse magnetic, TM), the 0 and ± 1 transmittance is 33%, 32%, 32%, respectively.