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Degradation of AlInAs HEMT Structures Induced by SiO2 Mask Layer Deposition
Degradation of AlInAs HEMT Structures Induced by SiO2 Mask Layer Deposition
1996
Haddab
Spicher
Beck
Keywords:
Deposition (chemistry)
High-electron-mobility transistor
Annealing (metallurgy)
Degradation (geology)
mask layer
transient analysis
Temperature measurement
Schottky diode
Optoelectronics
Materials science
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