Insulation means extend maintenance intervals pure ionic vacuum coating apparatus for

The present invention relates to a device for vacuum coating plain plasma apparatus for extending the maintenance period of the insulating material, comprising an annular insulation plates disposed between the bias magnetic filter and the ground of the anode, an insulating inner annular insulating plate is provided with an annular stop ring; insulating sectional L-shaped retaining ring, an insulating ring plate comprises a retaining ring collar and the lower end of the peripheral collar is provided, the ring plate is fixed between the upper surface of the annular insulating pad and the ground surface of the lower plate of the anode, the collar height and thickness of the annular insulation plates coincide, we define an annular groove on the inner wall surface of the annular insulating pad. In the above technical solution, by providing an insulating retaining ring, so that the plasma can not be directly deposited on the inner wall surface of the annular insulating pad after excitation, while the inner wall surface of the opening in the annular groove with an annular insulating pad, better ring to avoid burned and melted insulation plates are extended maintenance intervals annular insulating pad, and to improve production efficiency and quality of deposited thick film purer nanometers.