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Atomic layer epitaxy group 4 materials: Surface processes, thin films, devices and their characterization
Atomic layer epitaxy group 4 materials: Surface processes, thin films, devices and their characterization
1992
Robert F. Davis
Salah M. Bedair
Nadia A. El-Masry
Jeffrey T. Glass
Keywords:
X-ray photoelectron spectroscopy
Optoelectronics
Thin film
Solid-state physics
X-ray spectroscopy
Epitaxy
Atomic layer epitaxy
characterization
Laser ablation
Materials science
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