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Design and simulation of MEMS moisture sensor using COMSOL multiphysics software
Design and simulation of MEMS moisture sensor using COMSOL multiphysics software
2018
Muhamad Nazrin Ismail
Noriah Yusoff
Nor Hayati Saad
Amirul Abd Rashid
Keywords:
Moisture
Software
Microelectromechanical systems
Engineering
Multiphysics
Mechanical engineering
moisture sensor
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