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A Single Au Proof Mass 3-Axis MEMS Accelerometer with 3D Capacitive Detection Electrode
A Single Au Proof Mass 3-Axis MEMS Accelerometer with 3D Capacitive Detection Electrode
2021
Akira Onishi
Akihiro Uchiyama
Kohei Shibata
Takashi Ichikawa
Sangyeop Lee
Shinichi Iida
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
Hiroyuki Ito
Keywords:
Accelerometer
capacitive detection
Materials science
Proof mass
Microelectromechanical systems
Electrode
Optoelectronics
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