A method for manufacturing a battery, the battery and integrated circuit

2015 
A method of manufacturing a battery (2) includes defining an active region (107) and a Bondingzone (108) in a first main surface (110) of a first semiconductor substrate (100), (forming a first trench (104) in the Bondingzone 108) forming an anode (11) on the first semiconductor substrate (100) in the active region (107) and forming a cathode (12) at a an insulating material having support (150, 550, 750, 820, 900) on , The method further comprises stacking of the first semiconductor substrate (100) and the carrier (150, 550, 750, 820, 900) so that the first major surface (110) of the first semiconductor substrate (100) on one of a first major surface (153) of the carrier (150, 550, 750, 820, 900) adjacent side is arranged, wherein a cavity (130) between the first semiconductor substrate (100) and the support (150, 550, 750, 820, 900) is formed, and forming an electrolyte (230) to the cavity (130).
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