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Ultra-shallow 28-88 nm n+/p junction formation using PH 3 and AsH3 plasma immersion ion implantation
Ultra-shallow 28-88 nm n+/p junction formation using PH 3 and AsH3 plasma immersion ion implantation
1998
Baoli Yang
Nathan W. Cheung
Stuart W. Denholm
Jiqun Shao
Keywords:
Medicine
Radiochemistry
Leakage (electronics)
Obstetrics
Plasma-immersion ion implantation
Correction
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