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Functional Properties of Novel Metallic Hard Masks
Functional Properties of Novel Metallic Hard Masks
2013
Murirathna Padmanaban
Joon Yeon Cho
Huirong Yao
Douglas Mckenzie
Alberto D. Dioses
Salem K. Mullen
Elizabeth Wolfer
Kazunori Kurosawa
Keywords:
Materials science
Spin coating
Metal
Metallurgy
metal contamination
Correction
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