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Synthesis process of nano-crystals on Si substrates in etching of CF 4 /Ar plasmas
Synthesis process of nano-crystals on Si substrates in etching of CF 4 /Ar plasmas
2017
Gento Kuroda
Kazuo Takahashi
Koji Nishio
Keywords:
Plasma
Nano-
Reactive-ion etching
Etching
Crystal
Transmission electron microscopy
Materials science
Analytical chemistry
Nanotechnology
nano crystals
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