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Optimization of the Electrical Properties of Low-Dose SIMOX Wafers
Optimization of the Electrical Properties of Low-Dose SIMOX Wafers
1997
P.J. McMarr
B. J. Mrstik
M. E. Twigg
H.L. Hughes
M.J. Anc
Peter Roitman
G.A. Garcia
Keywords:
Analytical chemistry
Wafer
Materials science
low dose
Optoelectronics
Correction
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