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Improved Vt Stability of SNOS FETs by Oxygen Annealing
Improved Vt Stability of SNOS FETs by Oxygen Annealing
1973
Robert Charles Dockerty
Conrad Albert Barile
Arunachala Nagarajan
Stoyan M. Zalar
Keywords:
Biochemistry
Oxygen
Biology
Silicon nitride
Annealing (metallurgy)
Threshold voltage
Inorganic chemistry
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