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Development of novel lapping technique for hard brittle material substrate using Electric Field assisted Polishing
Development of novel lapping technique for hard brittle material substrate using Electric Field assisted Polishing
2019
Shogo Chiba
Takayuki Kusumi
Yoichi Akagami
Keywords:
Lapping
Polishing
Substrate (chemistry)
Brittleness
Composite material
Electric field
Materials science
Correction
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