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Effect of substrate temperature on structure and properties of HfO2 thin films prepared by magnetron sputtering
Effect of substrate temperature on structure and properties of HfO2 thin films prepared by magnetron sputtering
2016
Xi Yingxue
Liu Zheng
Wang Zhao
Liu Weiguo
Xu Junqi
Keywords:
Sputter deposition
Thin film
Substrate (chemistry)
Composite material
Materials science
Correction
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