Conception and Manufacturing of a Planar Inductance on NiFe Substrate

The present paper presents the study, realization and characterization of a micro-coil sandwiched using a relatively thick layer of magnetic material. The integration of this micro-coil with as a starting point a set of specifications, requires the following steps: Identification and validation of geometric parameters for the calculation of electrical parameters. Losses dissipated as heat in these electronic systems are becoming a major concern for designers. This prompted to take into account the thermal design. The results obtained have allowed to realize a micro-coil micro square planar coil sandwiched shaped between two magnetic materials. Several carried measures focused on the inductance and resistance which are related to the frequency f, the module and phase of the impedance, and the gap g. The operation of these data is used to trace the evolution of the inductance value Ls, the quality factor Q and the resistor Rs as a function of frequency.