COPPER-SELECTIVE FIELD-EFFECT TRANSISTOR (ISFET) WITH CHALCOGENIDE MEMBRANE
1989
ABSTRACT pCu-ISPET is developed, the thin film of chalcogenide glass As 2 Se 3 containing copper having been used as copper-sensitive membrane. The ellipsometry and C-V curves in EIS-system were applied to study in situ the membrane surface properties in contact with the electrolyte solution. The experimental data obtained confirm the modified surface layer model of pCu-ISFET operation.
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