Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings
2020
Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
26
References
3
Citations
NaN
KQI