Fuse wire manufacturing method and fuse wire

2014 
The invention provides a fuse wire manufacturing method. The method comprises depositing a titanium layer on a substrate, depositing a first titanium nitride layer on the titanium layer, depositing a thick metal layer on the first titanium nitride layer, and depositing a second titanium nitride layer on the thick metal layer; and the thick metal layer comprises a plurality of combined layers, each combined layer comprises a first metal layer and a second metal layer, and the electrical resistivity of the first metal layer is less than the electrical resistivity of the second metal layer. Correspondingly, the invention further provides the fuse wire. Through the technical scheme of the invention, the problem that the fuse wire cannot be fused due to adopted thick metal at the top layer of the fuse wire is solved, resistance of the fuse wire is increased, and then the fuse wire can be fused.
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