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4222 Development of a Micro Capacitive Ultrasonic Sensor Having Parylene Diaphragm
4222 Development of a Micro Capacitive Ultrasonic Sensor Having Parylene Diaphragm
2007
Seiji Aoyagi
Daisuke Ono
Katsuhide Furukawa
Tunehisa Tanaka
Kouji Inoue
Kaoru Yamashita
Masanori Okuyama
Keywords:
Capacitive sensing
Diaphragm (structural system)
Parylene
Ultrasonic sensor
Materials science
Composite material
Optoelectronics
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