Planar, low‐loss optical waveguides fabricated by solid‐phase regrowth

Planar, low‐loss AlGaAs/GaAs waveguides have been fabricated using the solid‐phase regrowth (SPR) process. Single‐mode waveguide with a propagation loss as low as 1.6 dB/cm have been obtained. This process requires only thin‐film deposition and low‐temperature short‐duration annealing (i.e., 650 °C for 30 s), thus making the SPR method a much simplified technique to induce compositional disordering. Simultaneous electrical isolation and compositional disordering are also demonstrated with the SPR process.