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Fabrication of 3-Dimentional Microstructure by Plating and Photolithography
Fabrication of 3-Dimentional Microstructure by Plating and Photolithography
2008
Yaichirou Nakamaru
Kouichi Misumi
Hideo Honma Dept
Keywords:
Microstructure
Chemistry of photolithography
Photolithography
Microelectromechanical systems
Composite material
Materials science
Nanotechnology
Fabrication
Correction
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