A Spiral Archimedean PMUT Array with Improved Focusing Performance

Piezoelectric MEMS ultrasonic transducers have advantages of low power consumption and small size, which brings a broad application prospect. The key performance on the development of the transducer is the acoustic emission performance, and most existing research focus on the structural optimization of a single PMUT element. In this paper, a spiral Archimedean PMUT array is proposed, which can generate greater axial sound pressure. The finite element simulation was carried out for the proposed array, and then the transducer array was fabricated. The test results show that the proposed array structure has 18% higher acoustic emission pressure along the axis than the traditional ones.