Template-Free Fabrication of Silicon Micropillar Structures by a One-Step Masking/MACE Composite Method

Siqi Yu,Wu Zihua,Fen Feng,Fuyuan Luan,Yuanyuan Wang,Huaqing Xie

Template-Free Fabrication of Silicon Micropillar Structures by a One-Step Masking/MACE Composite Method

2020

Siqi Yu
Wu Zihua
Fen Feng
Fuyuan Luan
Yuanyuan Wang
Huaqing Xie

Silicon micropillar structure was fabricated by a one-step masking/metal-assisted chemical etching (MACE) composite method. This method integrates the traditional metal-assisted chemical etching pr...

Keywords:

template free
Optoelectronics
Isotropic etching
Masking (art)
Silicon
Mace
One-Step
Materials science
Fabrication
Composite number

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