A multi-grid method to solve the squeeze film damping of micro-resonator

Predicting squeeze film damping is crucial in the design of MEMS devices. In view of the problems existing in the process of solving squeeze film damping, a multi-grid method is used to solve the squeeze film damping of micro-resonator, and a satisfying result is obtained. The multi-grid algorithm is considered having the advantage of rapid convergence and good numerical stability when solving the liquid questions of squeeze film damping. The pressure distribution functions between resonator plates and the value of various performance indicators are obtained. The relationships between the frequency and the amplitude also the frequency and the phase as well as the characteristics of damping force are obtained.