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The Effect of Silicide Processing on Stress Reduction in Silicon Device Structures with Strained SiGe Elements
The Effect of Silicide Processing on Stress Reduction in Silicon Device Structures with Strained SiGe Elements
2008
Igor Peidous
Patrick Press
Keywords:
Policide
Strained silicon
Silicide
Silicon
Composite material
Materials science
stress reduction
Optoelectronics
Correction
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