Gas concentration quasi-static regulation device based on mass spectrum feedback and regulation method

The present invention discloses a gas concentration quasi-static regulation device based on mass spectrum feedback and a regulation method. The device comprises a gas distribution apparatus, a mass spectrometer in communication with the gas distribution apparatus, and an embedded control system. The mass spectrometer uses the embedded control system to conduct mass spectrometry measurements on the gas within the gas distribution apparatus. The gas distribution apparatus includes a cylinder, a piston fitted in the cylinder, and a motor for driving displacement of the piston; and the piston and the bottom of the cylinder form a main cavity communicating with the mass spectrometer; the main cavity inputs test gas through a valve 1, and inputs a test gas through a valve 2. The embedded control system and electrical mechanical are in electrical connection; and according to the measurement results of the mass spectrometer, the motor adjusts the shift amount of the piston. The present invention also discloses a regulation method of the gas concentration quasi-static regulation device based on mass spectrum feedback.