A 3V CMOS-MEMS oscillator in 0.35μm CMOS technology

This paper presents the design, fabrication and characterization of a fully monolithic 11-MHz oscillator circuit operating with a low voltage MEMS resonator biased below the nominal 3.3V operation of the commercial 0.35-μm CMOS technology used to fabricate the device. The CMOS-MEMS oscillator comprises a polysilicon double-ended tuning fork (DETF) resonator embedded in a differential Pierce oscillator scheme. The device is suitable for RF applications and ultrasensitive mass sensing.