Enhanced moisture-barrier property of a hybrid nanolaminate composed of aluminum oxide and plasma polymer

Abstract Ultra-thin aluminum-oxide layers were grown by atomic layer deposition, and plasma-polymer layers derived from an n-hexane precursor were prepared by plasma polymerization. Hybrid nanolaminates were fabricated using one-cycle-grown aluminum-oxide layers and 50 nm-thick plasma polymer layers, and their moisture-barrier property was measured by an electrical calcium test. The moisture-barrier property of the hybrid nanolaminates was exponentially enhanced as the number of dyads increased, indicating that an ultra-thin single-cycle-grown aluminum oxide worked as a good moisture barrier. A 20-dyad hybrid nanolaminate composed of two-cycle-grown aluminum-oxide layers and 50 nm-thick plasma-polymer layers shows a water vapor transmission rate of 1×10 −3  g/m 2 ·day.