Oxygen Precipitation in MCZ Silicon: Behaviour and Dependence on the Origin of Raw Material and Growth Conditions

The demands of device producers for very low impurity content in Si, gives rise to a necessity to pay attention to the impurity concentration in the raw material. The analysis of impurity distribution in quartz of various genotypes shows that the most chemically pure quartz is the quartz from the veins formed as a result of hydrothermal processes and metamorphic treatments.