NANOCHANNELS WITH TWO PORES IN SERIES FOR SINGLE PARTICLE SENSING AND CHARACTERIZATION

We report the fabrication and use of nanochannels with multiple nanopores in series for resistive-pulse sensing and characterization of virus capsids. Two pores in series permits single particles to be probed multiple times to improve counting statistics and to determine physical properties. To fabricate the nanochannels, we combined electron beam lithography with reactive ion etching to confine both the channel width and depth to the nanoscale.