Spectroscopic characteristic measurement apparatus and a measurement method of spectral characteristics

2013 
The present invention enables measurement emitted from the measuring object light incident to fixed reflecting mirror portion and the movable mirror portion is formed by the optical coherence light and measurement light by the movable mirror portions reflecting the measurement of the fixed reflector mirror portion is reflected. At this time, the measurement light is obtained by causing the movable mirror is moved INTERFERENCE unit change in light intensity based on the measurement light variations obtained interferogram. Further, while the reference to the wavelength band of the measurement light wavelength narrow band part of the light incident on the fixed mirror portion and the movable mirror portion is formed by the fixed mirror portion reference light reflected and by this can be interference light reflected by the movable mirror portion reference light. At this time, the movable mirror unit is moved, whereby the light intensity based on the amplitude variation INTERFERENCE reference light and said measurement light with said reference light in the same wavelength of the measuring light and the reference light of the phase difference and to correct the FIG interferometric measurement light interference pattern is obtained based on the corrected spectrum of the measurement light.
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