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Supermagnetron Plasma CVD and Qualitative Analysis of Electrical Conductive Hard Carbon (DLC) Films
Supermagnetron Plasma CVD and Qualitative Analysis of Electrical Conductive Hard Carbon (DLC) Films
1999
Naoki Otaka
Masahiro Yoshida
Touichi Murakami
Haruhisa Kinoshita
Keywords:
Plasma
Carbon
Composite material
Electrical conductor
Materials science
qualitative analysis
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