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Modeling of Gas-Phase Reactions in Electron Cyclotron Resonance Plasma forB!!(JOxide Deposition
Modeling of Gas-Phase Reactions in Electron Cyclotron Resonance Plasma forB!!(JOxide Deposition
1996
Masaki Tozawa
Tamotsu Morimoto
Takashi Akahori
Hideaki Amano
Nobuo Ishii
Yasuyoshi Yasaka
Keywords:
Forb
Atomic physics
Materials science
gas phase
Deposition (law)
Plasma
Electron cyclotron resonance
Correction
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