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The role of the oxide in the carrier selectivity of metal/poly-Si/oxide contacts to silicon wafers
The role of the oxide in the carrier selectivity of metal/poly-Si/oxide contacts to silicon wafers
2017
Gaby J.M. Janssen
L.J. Geerligs
Ingrid Romijn
M.K. Stodolny
Keywords:
Selectivity
Oxide
Chemical engineering
Metal
Wafer
Materials science
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