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Electromechanical response of high frequency silicon nanowire resonators:simulation and measurements
Electromechanical response of high frequency silicon nanowire resonators:simulation and measurements
2012
Laurent Duraffourg
Sébastien Hentz
Alexandra Koumela
C. Marcoux
D. Mercier
Stephen T. Purcell
Keywords:
Resonator
Nanowire
Electronic engineering
Silicon
Materials science
Optoelectronics
silicon nanowires
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