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Factors Affecting Compressive Stress Produced in Titanium Nitride Films Deposited by Reactive HCD Ion Plating
Factors Affecting Compressive Stress Produced in Titanium Nitride Films Deposited by Reactive HCD Ion Plating
2001
Ken-ichi Miura
Itsuo Ishigami
Keywords:
Compressive strength
Metallurgy
Ion plating
Titanium nitride
Materials science
Correction
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