Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy

Xiaohui Qu,Danhua Yan,Ruoshui Li,Jiajie Cen,Chenyu Zhou,Wenrui Zhang,Deyu Lu,Klaus Attenkofer,Dario Stacchiola,Mark S. Hybertsen,Eli Stavitski,Mingzhao Liu

Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy

2021

Xiaohui Qu
Danhua Yan
Ruoshui Li
Jiajie Cen
Chenyu Zhou
Wenrui Zhang
Deyu Lu
Klaus Attenkofer
Dario Stacchiola
Mark S. Hybertsen
Eli Stavitski
Mingzhao Liu

In situ synchrotron X-ray absorption near-edge structure characterization of thin-film titania growth by atomic layer deposition (ALD) over ZnO nanowires reveals persistent low-coordinated Ti motif...

Keywords:

Synchrotron
In situ
Analytical chemistry
X-ray absorption spectroscopy
Atomic layer deposition
Thin film
Absorption (pharmacology)
Materials science
zno nanowires

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