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Implementation of High-k / Metal Gate in High-Volume Manufacturing
Implementation of High-k / Metal Gate in High-Volume Manufacturing
2008
Reza Arghavani
Melody Agustine
Khaled Ahmed
Chern-Ping Cheng
Srinivas Gandikota
Steven Hung
R. Schreutelkamp
Naomi Yoshida
May Yu
Keywords:
High-κ dielectric
Manufacturing engineering
Materials science
high volume manufacturing
Engineering physics
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