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Elemental thin film depth profiles by using self-consistent ion beam analysis – MultiSIMNRA: a new computational tool
Elemental thin film depth profiles by using self-consistent ion beam analysis – MultiSIMNRA: a new computational tool
2016
Cleber L. Rodrigues
M. A. Rizzutto
Tiago F. Silva
B.M. Mayer
Nemitala Added
Manfredo Harri Tabacniks
Keywords:
Thin film
Ion beam analysis
Optics
Materials science
self consistent
Molecular physics
Correction
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