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Modeling the EUV/UV irradiance within the FP7 SOLID Project
Modeling the EUV/UV irradiance within the FP7 SOLID Project
2015
Margit Haberreiter
Véronique Delouille
Giulio Del Zanna
Ingolf Dammasch
Marie-Dominique
Thierry Dudok de Wit
Ilaria Ermolli
Andrew R. Jones
Matthieu Kretzschmar
B. Mampaey
Robert Schaefer
Gerhard Schmidtke
Micha Schoell
Gérard Thuillier
Cis Verbeeck
Seth Wieman
Thomas N. Woods
Werner Schmutz
Keywords:
Environmental science
Extreme ultraviolet lithography
Optics
Irradiance
Correction
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