Low-loss EELS methods

Abstract In this chapter, computational procedures for the analysis of materials properties in low-loss EELS are presented. The discussion is necessarily restricted to only some of these methods; of course, these are the tools that are used in the following chapters of this work. Hence, the stress is put into the signal processing, calculation, and simulation tools designed for STEM-EELS experiments in semiconductor materials. First, the common analytical tools for the analysis of the low-loss EELS spectra are explained. Following that, statistical tools conceived for the analysis of multidimensional datasets are separately presented. Those are most useful for our purposes, but are perhaps less known to the typical EELS analyst. Finally, the density functional theory tools (DFT) for the simulation of EELS are also presented.