Micro-channel formation on NiCuZn ferrite green sheets prepared by hot embossing

Abstract Preparing micro-channels for LTCC using hot embossing technology has become increasingly important. Hot embossing has been applied to fuel-cells, bio-medical devices and sensors. This study focuses on the organic vehicle composition, hot-embossing temperature, pressure and ceramic green sheet thickness effects on embossed green sheet micro-channel resolution. The results show that (1) the hot-embossing pressure mainly affects the micro-channel depth. The hot-embossing temperature predominantly affects the micro-channel depth and width. (2) Green sheets with plasticizer/binder (P/B) = 3/7 exhibited higher stiffness and lower ultimate tensile fracture strain leading to better embossed micro-channel resolution; (3) the embossed micro-channel resolution increased and the number of cracks in the green sheet decreased with increasing green sheet thickness.