Si1-xGex-Channel PFETs: Scalability, Layout Considerations and Compatibility with Other Stress Techniques

Geert Eneman,Geert Hellings,Jerome Mitard,Liesbeth Witters,Shinpei Yamaguchi,Marie Garcia Bardon,Phillip Christie,C. Ortolland,Andriy Hikavyy,Paola Favia,Mireia Bargallo Gonzalez,Eddy Simoen,F. Crupi,Masaharu Kobayashi,Jacopo Franco,Shinji Takeoka,Raymond Krom,Hugo Bender,Roger Loo,Corneel Claeys,Kristin De Meyer,Thomas Hoffmann

Si1-xGex-Channel PFETs: Scalability, Layout Considerations and Compatibility with Other Stress Techniques

2011

a imec, Kapeldreef 75, 3001 Heverlee, Belgium b ESAT-INSYS department, Katholieke Universiteit Leuven, 3000 Leuven, Belgium c also Post-doctoral fellow of the Fund for Scientific Research-Flanders (FWO), 1000 Brussels, Belgium d also IWT-Vlaanderen, 1000 Brussels, Belgium e Sony assignee at imec, 3001 Leuven, Belgium f Currently at IBM g Universita della Calabria, Arcavacata di Rende, Italy h Panasonic assignee at imec, 3001 Leuven, Belgium

Keywords:

Parallel computing
Software engineering
Scalability
Computer science
Operating system
Engineering
Communication channel
Engineering drawing
IBM

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