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Effect of Alanine on Cu/TaN Selectivity in Cu-CMP
Effect of Alanine on Cu/TaN Selectivity in Cu-CMP
2005
Park Jin-Hyung
Kim Min Seok
Paik Ungyu
Park Jea-Gun
Keywords:
Inorganic chemistry
Organic chemistry
Alanine
Chemistry
Materials science
Selectivity
Correction
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