Lighting system suitable for applications in metrology and coordinate measuring machine with such a lighting system
2015
The invention relates to an illumination system 30; 30a; 50; 50a; 50b; 50c; 60; 70; 80; 90 for generating a reflected light bright field for metrology applications comprising a plurality of light sources 31, 32, 33 different with each other emission spectra, and at least one dichroic beam splitter 35 for superimposing or combining the light from at least two of the light sources 31, 32, 33 along an optical axis of the illumination system 30; 30a; 50; 50a; 50b; 50c; 60; 70; 80; 90, wherein on the optical path from the light sources 31, 32, 33 to the field to be illuminated of the illumination system 30; 30a; 50; 50a; 50b; 50c; 60; 70; 80; 90 between the light sources 31, 32, 33 and the at least one beam splitter 35 and / or between the at least one beam splitter 35 and the field to be illuminated at least a first homogenizing means 37a, 38a, 39a, 40; 41; 51, 52, 53 provided for light mixing, and wherein the at least one homogenizing 37a, 38a, 39a, 40; 41; 51, 52, 53 is selected or for light mixture composed is made of the optical elements of the group: rod integrators cavity integrators, fiber bundles, lens and / or mirror arrays, and wherein on or at the at least one dichroic beam splitter (35) at least a first focusing lens (37, 38, 39; 37a, 38a, 39a; 55; 55a) by means of additive processing method ablative machining process and / or by the application of a separately manufactured optical element in the form of an aspherical lens, a Fresnel lens and / or a diffractive optical element (DOE) is designed. Further, the invention relates to a coordinate measuring machine with such an illumination system 30; 30a; 50; 50a; 50b; 50c; 60; 70; 80; 90th
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