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19. Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates
19. Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates
1997
Fred Preuninger
Joseph Blasko
Steven Meester
Taeho Kook
Keywords:
Polycrystalline silicon
Etching
Materials science
Electronic engineering
Engineering physics
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