Tail gas treatment method and device for CVD/CVI technique

The invention provides a tail gas treatment method and device for a CVD/CVI technique. Three stages of adsorption which are cooperated and supported with each other are designed, wherein during the primary adsorption, by using the reverse contact between adsorption oil and the tail gas, the mixing time of the tail gas and oil mist is prolonged, the temperature of the tail gas is lowered, the liquefied solid-liquid organics are instantaneously bonded with the adsorption oil and together fall down onto a carbon felt in a crucible, thus the tail gas adsorption capability is improved; meanwhile, after the oil mist with the organics falls down onto the carbon felt strip in the stainless crucible, the bonding capability of th carbon felt is enhanced; when passing through the gapes and vent holes among the carbon felts, the tail gas is again filtered through the carbon felt of multiple layers of densities and gradients; and when the tail gas is exhausted out of a metal tank body, the adsorption oil at the bottom of the tank can be used for filtering again. Through the multiple stage filter method, the solid-liquid organics content in the tail gas is greatly reduced, thus the work safety factor and cost of a subsequent metal device are increased.