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New Characterization of TiSi2 Local Wiring Technology and Its Impact on Low Power / High Speed Quarter Micron CMOS
New Characterization of TiSi2 Local Wiring Technology and Its Impact on Low Power / High Speed Quarter Micron CMOS
1995
Atsushi Ohtomo
Jiro Ida
Nobuo Ozawa
Makiko Kageyama
Hiroshi Onoda
Keywords:
Nanotechnology
Quarter (United States coin)
Electronic engineering
Micrometre
CMOS
Materials science
Optoelectronics
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